Advanced Ion PVD Process for Superior Diamond and Metal Coatings

100% Ion Deposition at high rates from the compact Radial Arc source

Macroparticle Elimination without Compromising Performance or Cost

The efficiency with which ions are guided through the filter (and thus the maximum deposition rate) can be measured by determining the ion current that reaches the substrate relative to the ion flux that leaves the cathode.  The ion flux that leaves the cathode is typically about 10% of the arc current.  The ion transport has been measured for the Fluxion source as a function of magnetic field strength and is shown above. These measurements indicate that the ion transmission through the source-filter system (characterized by the ion current at the substrate divided by the total arc current) could be as high as 13%, as shown in Figure 6.  This compares well with other FCA sources that report ion transmission approaching optimally 5% (with correspondingly lower deposition rates).

Images of the Surface Quality of Unfiltered and Radial Arc Hard Carbon Films

Unfiltered Cathodic-Arc Hard Carbon

Radial Arc Hard Carbon

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